Shutdown lampoly SNF 2010-04-21 10:42:25: Cl2 flow problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Apr 21 10:42:25 PDT 2010


Looks like the MFC or gas filiter has a restriction.  It is only able to flow 35 sccm (max flow = 50 sccm).  Need to pump and purge the gas panel.




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