Shutdown lampoly SNF 2010-04-21 10:42:25: Cl2 flow problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Apr 22 15:04:31 PDT 2010


Replaced the Cl2 MFC and filter.  Ran at maximum flow (50 sccm) for 15 min with no drop in flow.  Ran 8 wafers using recipe 1 with no problems.




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