Shutdown lampoly SNF 2010-04-21 10:42:25: Cl2 flow problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Apr 22 15:04:31 PDT 2010

Previous message: Shutdown lampoly SNF 2010-04-21 10:42:25: Cl2 flow problem
Next message: Comment lampoly SNF 2010-04-21 11:37:28: Etch rate Data from 4/20/2010
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Replaced the Cl2 MFC and filter.  Ran at maximum flow (50 sccm) for 15 min with no drop in flow.  Ran 8 wafers using recipe 1 with no problems.

Previous message: Shutdown lampoly SNF 2010-04-21 10:42:25: Cl2 flow problem
Next message: Comment lampoly SNF 2010-04-21 11:37:28: Etch rate Data from 4/20/2010
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list