Shutdown lampoly SNF 2010-04-25 11:04:19: Exit arm stuck in chamber

usha at snf.stanford.edu usha at snf.stanford.edu
Sun Apr 25 11:04:20 PDT 2010


Exit arm failed requested extension action.  Exit arm failed sensor test in process chamber.  Etch completed no issue.  Wafer stcuk in chamber.




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