Problem lampoly SNF 2010-04-26 12:46:49: Alarm while unloading - Wafer not sensed at exit cassette

usha at snf.stanford.edu usha at snf.stanford.edu
Mon Apr 26 12:46:50 PDT 2010


Alarm while unloading - Exit arm stuck in cassette.  Wafers in progress. Alarm: Wafer not sensed in exit cassette. 




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