Shutdown lampoly SNF 2010-04-26 13:11:28: Exit arm stuck is not retracting from cassette.
usha at snf.stanford.edu
usha at snf.stanford.edu
Mon Apr 26 13:11:29 PDT 2010
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Problem lampoly SNF 2010-04-26 12:46:49: Alarm while unloading - Wafer not sensed at exit cassette
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Shutdown lampoly SNF 2010-04-26 13:11:28: Exit arm stuck is not retracting from cassette.
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Problem lampoly SNF 2010-04-26 12:46:49: Alarm while unloading - Wafer not sensed at exit cassette
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Shutdown lampoly SNF 2010-04-26 13:11:28: Exit arm stuck is not retracting from cassette.
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