April 2010 Archives by thread

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Starting: Wed Apr 7 18:14:50 PDT 2010
Ending: Mon Apr 26 14:02:07 PDT 2010
Messages: 33

• Comment lampoly SNF 2010-04-07 18:14:50: pressure deviation   filip at snf.stanford.edu
  • Comment lampoly SNF 2010-04-07 18:14:50: pressure deviation   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-04-10 16:55:01: Recipe failing with Pressure tolerance error   rik at snf.stanford.edu
  • Problem lampoly SNF 2010-04-10 16:55:01: Recipe failing with Pressure tolerance error   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2010-04-11 00:15:26: pressure   barlian at snf.stanford.edu
  • Problem lampoly SNF 2010-04-11 00:15:26: pressure   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2010-04-11 00:20:06: intermittent error   barlian at snf.stanford.edu
  • Problem lampoly SNF 2010-04-11 00:20:06: intermittent error   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2010-04-12 15:05:47: Box of oxide coated wafers   rik at snf.stanford.edu
  • Comment lampoly SNF 2010-04-12 15:05:47: Box of oxide coated wafers   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-04-12 15:45:24: RF and pressure tolerance problems   rik at snf.stanford.edu
  • Problem lampoly SNF 2010-04-12 15:45:24: RF and pressure tolerance problems   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-04-12 16:33:15: Pressure control problem?   mtang at snf.stanford.edu
  • Problem lampoly SNF 2010-04-12 16:33:15: Pressure control problem?   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-04-13 07:51:45: Pressure control problem   eenriquez at snf.stanford.edu
  • Shutdown lampoly SNF 2010-04-13 07:51:45: Pressure control problem   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-04-13 15:10:30: Update   eenriquez at snf.stanford.edu
  • Comment lampoly SNF 2010-04-13 15:10:30: Update   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-04-20 15:48:55: Cl2 gas low   carterlin at snf.stanford.edu
  • Problem lampoly SNF 2010-04-20 15:48:55: Cl2 gas low   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-04-21 10:42:25: Cl2 flow problem   eenriquez at snf.stanford.edu
  • Shutdown lampoly SNF 2010-04-21 10:42:25: Cl2 flow problem   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-04-21 11:37:28: Etch rate Data from 4/20/2010   usha at snf.stanford.edu
• Comment lampoly SNF 2010-04-21 16:33:12: Update Cl2 flow problem   eenriquez at snf.stanford.edu
  • Comment lampoly SNF 2010-04-21 16:33:12: Update Cl2 flow problem   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-03-10 14:02:16: Maintenance work   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-04-22 15:14:14: Needs process qual   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-04-25 11:04:19: Exit arm stuck in chamber   usha at snf.stanford.edu
  • Shutdown lampoly SNF 2010-04-25 11:04:19: Exit arm stuck in chamber   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2010-04-26 12:46:49: Alarm while unloading - Wafer not sensed at exit cassette   usha at snf.stanford.edu
  • Problem lampoly SNF 2010-04-26 12:46:49: Alarm while unloading - Wafer not sensed at exit cassette   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-04-26 13:11:28: Exit arm stuck is not retracting from cassette.   usha at snf.stanford.edu
  • Shutdown lampoly SNF 2010-04-26 13:11:28: Exit arm stuck is not retracting from cassette.   eenriquez at snf.stanford.edu

Last message date: Mon Apr 26 14:02:07 PDT 2010
Archived on: Sun Dec 23 09:06:13 PST 2012

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