From cbaxter at snf.stanford.edu Mon Aug 2 09:35:19 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:35:19 -0700 Subject: Problem lampoly SNF 2010-07-30 21:31:45: Exit arm failed request action extension Message-ID: Elmer recovered the wafer.. From cbaxter at snf.stanford.edu Mon Aug 2 09:36:11 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:36:11 -0700 Subject: Shutdown lampoly SNF 2010-07-31 12:33:46: exit aram problem Message-ID: Elmer recovered the wafer.. From eenriquez at snf.stanford.edu Mon Aug 2 11:21:18 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 Aug 2010 11:21:18 -0700 Subject: Comment lampoly SNF 2010-07-29 14:49:51: Test after after power outtage Message-ID: Archive From raneeyoo at snf.stanford.edu Sun Aug 8 17:43:27 2010 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sun, 8 Aug 2010 17:43:27 -0700 Subject: Shutdown lampoly SNF 2010-08-08 17:43:27: 40 entrance load lock pumpdown failed Message-ID: When I tried to run recipe 1 after testing run, an error came up. "40 entrance load lock pumpdown failed. convectron above crossover pressure." two of my wafers are inside Lampoly. they did not go through the process because of pumpdown failure. These are very important wafers for me. Please unload the two wafers and put into a cassette labled w/ "raneeyoo" on the table near Lampoly. thank you very much. From eenriquez at snf.stanford.edu Mon Aug 9 08:06:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Aug 2010 08:06:33 -0700 Subject: Shutdown lampoly SNF 2010-08-08 17:43:27: 40 entrance load lock pumpdown failed Message-ID: entrance load lock wouldn't pump down. Vented the load lock and cleaned the LL oring. Pumped down the LL and resumed process. The user's two wafers processed without a problem. Both wafers are now in his wafer box. We'll cycle more wafers to verify the LL pumping is OK. From mtang at snf.stanford.edu Mon Aug 9 15:44:05 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 9 Aug 2010 15:44:05 -0700 Subject: Shutdown lampoly SNF 2010-08-09 15:44:05: Loadlocks don't pump down Message-ID: Entrance loadlock door did not shut. I pushed it shut, hoping to get Kyeongran's wafers out, but the loadlocks don't reach crossover pressure. I guess the entrance loadlock door is leaky. Kyeongran has two of her real device wafers inside. She ran 5 dummies without problem, and the second of her device wafers is now stuck in the entrance loadlock. She has another device wafer inside the chamber, already processed. Please help rescue her wafers. From mtang at snf.stanford.edu Tue Aug 10 14:39:14 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 10 Aug 2010 14:39:14 -0700 Subject: Shutdown lampoly SNF 2010-08-09 15:44:05: Loadlocks don't pump down Message-ID: The outside entrance loadlock door was intermittently failing to close. Elmer increased the air pressure to the solenoid and put vacuum grease on the oring to help seal. I think Mike checked the loadlock pump too. Cesar found an air leak on the solenoid and a leak on the air line to the solenoid manifold. He reset the solenoids and tightend the fitting on the air line. This may need to be replaced as a little air can still be felt. Wafers are cycling now and so far, no problem. From raneeyoo at snf.stanford.edu Wed Aug 11 18:09:17 2010 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Wed, 11 Aug 2010 18:09:17 -0700 Subject: Problem lampoly SNF 2010-08-11 18:09:16: a entrance loadlock outer door closed sensor failed Message-ID: Hello! The entrance load lock door failed to close again. My 4 real wafers are still in Lampoly. Please help this. thanks, Kyeongran From eenriquez at snf.stanford.edu Fri Aug 13 07:28:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Aug 2010 07:28:33 -0700 Subject: Problem lampoly SNF 2010-08-11 18:09:16: a entrance loadlock outer door closed sensor failed Message-ID: Repaired leaky pneumatic line. From cursive at snf.stanford.edu Sun Aug 15 12:52:34 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 15 Aug 2010 12:52:34 -0700 Subject: Problem lampoly SNF 2010-08-15 12:52:34: shuttle sensor vaccum fail Message-ID: error message 18 From cursive at snf.stanford.edu Sun Aug 15 12:55:06 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sun, 15 Aug 2010 12:55:06 -0700 Subject: Problem lampoly SNF 2010-08-15 12:55:05: shuttle sensor vaccume fail Message-ID: dummy wafers stuck inside the chamber From cbaxter at snf.stanford.edu Mon Aug 16 08:30:59 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Aug 2010 08:30:59 -0700 Subject: Problem lampoly SNF 2010-08-15 12:52:34: shuttle sensor vaccum fail Message-ID: The dummy wafer was bad (warp), recovered wafer and continue.. From cbaxter at snf.stanford.edu Mon Aug 16 08:31:07 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Aug 2010 08:31:07 -0700 Subject: Problem lampoly SNF 2010-08-15 12:55:05: shuttle sensor vaccume fail Message-ID: From haemmerl at snf.stanford.edu Mon Aug 16 12:16:06 2010 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Mon, 16 Aug 2010 12:16:06 -0700 Subject: Shutdown lampoly SNF 2010-08-16 12:16:05: Wafer stuck Message-ID: 1 wafer is stuck in the process chamber because of the power failure From eenriquez at snf.stanford.edu Mon Aug 16 14:53:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Aug 2010 14:53:04 -0700 Subject: Shutdown lampoly SNF 2010-08-16 12:16:05: Wafer stuck Message-ID: Recovered the user's wafer and placed in one of the cassettes on the Lampoly table. Cycled 5 wafers using recipe 1 wtih no problems. From mtang at snf.stanford.edu Mon Aug 16 16:12:40 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 16 Aug 2010 16:12:40 -0700 Subject: Comment lampoly SNF 2010-08-16 16:12:39: Shuttle vacuum sensor Message-ID: My bad. I don't know if this is related to yesterday's incident, but I forgot to log that I saw this error last week. At that time, there was wafer vacuum and the wafer was stuck on, but the sensor didn't sense. Ran wafer clearout to retrieve the wafers. From wslee at snf.stanford.edu Tue Aug 17 23:54:11 2010 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Tue, 17 Aug 2010 23:54:11 -0700 Subject: Problem lampoly SNF 2010-08-17 23:54:10: Cannot run recipe 99 Message-ID: The RF bias for recipe 99 stays around 300. It is unable to come anywhere near the 700 setpoint. From mtang at snf.stanford.edu Wed Aug 18 08:45:27 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 18 Aug 2010 08:45:27 -0700 Subject: Problem lampoly SNF 2010-08-17 23:54:10: Cannot run recipe 99 Message-ID: Not sure why, but recipe 99 was incorrect. RF setpoint should be 600 and the presets were off. When corrected, the recipe runs fine. From mtang at snf.stanford.edu Wed Aug 18 10:32:31 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 18 Aug 2010 10:32:31 -0700 Subject: Problem lampoly SNF 2010-08-18 10:32:30: floppy drive Message-ID: The floppy drive seems to work only intermittently. Could the power supply be bad? From mtang at snf.stanford.edu Thu Aug 26 16:31:18 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 26 Aug 2010 16:31:18 -0700 Subject: Comment lampoly SNF 2010-08-26 16:31:17: Gas 4 is SF6 Message-ID: Gas 4 is labeled "4", but is actually SF6. The keyboard interface does not appear to accept alphanumeric inputs. From rik at snf.stanford.edu Sat Aug 28 22:43:53 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Sat, 28 Aug 2010 22:43:53 -0700 Subject: Shutdown lampoly SNF 2010-08-28 22:43:53: shuttle vacuum failure Message-ID: Alarm #18: shuttle vacuum should be true, but is false From cbaxter at snf.stanford.edu Mon Aug 30 00:02:39 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 30 Aug 2010 00:02:39 -0700 Subject: Shutdown lampoly SNF 2010-08-28 22:43:53: shuttle vacuum failure Message-ID: Leaking vacuum tubing, cut vacuum tuning and reconnected.