Shutdown lampoly SNF 2010-08-08 17:43:27: 40 entrance load lock pumpdown failed

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Sun Aug 8 17:43:27 PDT 2010


When I tried to run recipe 1 after testing run, an error came up.
"40 entrance load lock pumpdown failed.  convectron above crossover pressure."
two of my wafers are inside Lampoly.  they did not go through the process because of pumpdown failure.
These are very important wafers for me.
Please unload the two wafers and put into a cassette labled w/ "raneeyoo" on the table near Lampoly.
thank you very much.




More information about the lampoly-pcs mailing list