Shutdown lampoly SNF 2010-08-08 17:43:27: 40 entrance load lock pumpdown failed

eenriquez at eenriquez at
Mon Aug 9 08:06:33 PDT 2010

entrance load lock wouldn't pump down.  Vented the load lock and cleaned the LL oring.  Pumped down the LL and resumed process.  The user's two wafers processed without a problem.  Both wafers are now in his wafer box.  We'll cycle more wafers to verify the LL pumping is OK.

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