Shutdown lampoly SNF 2010-08-08 17:43:27: 40 entrance load lock pumpdown failed

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 9 08:06:33 PDT 2010


entrance load lock wouldn't pump down.  Vented the load lock and cleaned the LL oring.  Pumped down the LL and resumed process.  The user's two wafers processed without a problem.  Both wafers are now in his wafer box.  We'll cycle more wafers to verify the LL pumping is OK.




More information about the lampoly-pcs mailing list