Shutdown lampoly SNF 2010-08-09 15:44:05: Loadlocks don't pump down

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Aug 10 14:39:14 PDT 2010


The outside entrance loadlock door was intermittently failing to close.  Elmer increased the air pressure to the solenoid and put vacuum grease on the oring to help seal.  I think Mike checked the loadlock pump too.  Cesar found an air leak on the solenoid and a leak on the air line to the solenoid manifold.  He reset the solenoids and tightend the fitting on the air line.  This may need to be replaced as a little air can still be felt.  Wafers are cycling now and so far, no problem.




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