Problem lampoly SNF 2010-08-11 18:09:16: a entrance loadlock outer door closed sensor failed

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Wed Aug 11 18:09:17 PDT 2010


Hello!
The entrance load lock door failed to close again.
My 4 real wafers are still in Lampoly.
Please help this.
thanks,
Kyeongran




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