Problem lampoly SNF 2010-08-15 12:55:05: shuttle sensor vaccume fail
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Aug 16 08:31:07 PDT 2010
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Problem lampoly SNF 2010-08-15 12:55:05: shuttle sensor vaccume fail
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Shutdown lampoly SNF 2010-08-16 12:16:05: Wafer stuck
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Problem lampoly SNF 2010-08-15 12:55:05: shuttle sensor vaccume fail
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Shutdown lampoly SNF 2010-08-16 12:16:05: Wafer stuck
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