Shutdown lampoly SNF 2010-08-16 12:16:05: Wafer stuck

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 16 14:53:04 PDT 2010


Recovered the user's wafer and placed in one of the cassettes on the Lampoly table.  Cycled 5 wafers using recipe 1 wtih no problems.




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