Comment lampoly SNF 2010-08-16 16:12:39: Shuttle vacuum sensor

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon Aug 16 16:12:40 PDT 2010


My bad.  I don't know if this is related to yesterday's incident, but I forgot to log that I saw this error last week.  At that time, there was wafer vacuum and the wafer was stuck on, but the sensor didn't sense.   Ran wafer clearout to retrieve the wafers.




More information about the lampoly-pcs mailing list