Problem lampoly SNF 2010-12-10 11:00:23: Dropping wafers in the exit load lock

usha at snf.stanford.edu usha at snf.stanford.edu
Fri Dec 10 11:00:23 PST 2010


Arm was stuck at XLL.  Wafer was not under vacuum.  Tried to lift wafer to check if arm would go back in.  Did not.  Could not intialize arm as load and process was active.  When I came back after a few minutes, arm had retracted and the wafers that were taken out of the chamber were dropped in the exit load lock.  Stopped loading wafers and removed     the exit cassette to prevent wafers from piling into the exit load lock.




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