Shutdown lampoly SNF 2010-12-09 20:15:52: Lam -- Wafer Stuck in Exit Loadloack -- Jim
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Fri Dec 10 16:28:52 PST 2010
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Shutdown lampoly SNF 2010-12-09 20:15:52: Lam -- Wafer Stuck in Exit Loadloack -- Jim
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Problem lampoly SNF 2010-12-10 11:00:23: Dropping wafers in the exit load lock
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Wafers removed.
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Shutdown lampoly SNF 2010-12-09 20:15:52: Lam -- Wafer Stuck in Exit Loadloack -- Jim
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Problem lampoly SNF 2010-12-10 11:00:23: Dropping wafers in the exit load lock
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