Problem lampoly SNF 2010-12-10 11:00:23: Dropping wafers in the exit load lock

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Dec 10 16:43:00 PST 2010


Wafers cleared.  But wafer present sensor on the receiver cassette needs to be adjusted.  Please make sure your wafers unload into the cassette.  Press HALT on the status page and contact Staff if they do not.




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