Comment lampoly SNF 2010-12-10 16:48:35: Configuration file changes

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Dec 10 16:48:36 PST 2010


For the record, Jim McVittie adjusted the RF calibration as follows:
Config page #1:  RF #1 FWD ao and ai set at 1350 W.  RF #1 REF remains at 250 W.
Config page #2:  RF #3 FWD ao and ai set at 1790 W.  RF #3 REF remains at 250 W
Config page #3:  HALO PRESENT = TRUE
Adjustable rotating coil set at 10 degrees.
Recipe #1 top RF pretunes adjusted as following:
Step 3 breakthrough etch (load/tune) = 29000/14000
Step 5 main etch = 26000/21000
Step 7 overetch = 24000/25000




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