Comment lampoly SNF 2010-12-10 18:28:31: Poly etch rate estimated at 3200A on my test wafer

bchui at snf.stanford.edu bchui at snf.stanford.edu
Fri Dec 10 18:28:31 PST 2010


Poly etch rate estimated at 3200A on my test wafer (blanket poly on 1130A oxide)




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