Shutdown lampoly SNF 2010-12-13 17:11:13: Gap drive error again

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Dec 13 17:11:14 PST 2010


One wafer stuck in Entrance Load Lock, all other chambers should be clear.  Please retrieve my device wafer carefully.  Would greatly appreciate if staff could fix the machine once more to allow me to finish etching all my wafers before the xmas shutdown. Thanks!  Ben




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