Shutdown lampoly SNF 2010-12-13 17:11:13: Gap drive error again

bchui at bchui at
Mon Dec 13 17:11:14 PST 2010

One wafer stuck in Entrance Load Lock, all other chambers should be clear.  Please retrieve my device wafer carefully.  Would greatly appreciate if staff could fix the machine once more to allow me to finish etching all my wafers before the xmas shutdown. Thanks!  Ben

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