From eenriquez at snf.stanford.edu Mon Jan 4 15:02:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:02:29 -0800 Subject: Comment lampoly SNF 2010-01-04 15:02:29: Test OK Message-ID: Ran recipe 99 multipe times with no problems. From usha at snf.stanford.edu Mon Jan 11 11:05:50 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Mon, 11 Jan 2010 11:05:50 -0800 Subject: Comment lampoly SNF 2010-01-11 11:05:48: Quals - 1/8/2010 Message-ID: Ran Quals with Poly, oxide and resist wafers on 1/8/2010 with recipe 1. Did not run Si wafer as I did not have a patterned Si wafer. Poly Loss: 5648A; Unif = 2.85% Resist Loss: 1327A; Unif = 4.94% Oxide Loss: 429A; Unif =8.04% Results comparable to Dec qual data. From eenriquez at snf.stanford.edu Tue Jan 12 10:40:52 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Jan 2010 10:40:52 -0800 Subject: Problem lampoly SNF 2009-12-14 11:59:42: Needs process qual Message-ID: Process quals completed From mtang at snf.stanford.edu Wed Jan 13 10:43:52 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 13 Jan 2010 10:43:52 -0800 Subject: Comment lampoly SNF 2010-01-13 10:43:52: Etch quals from 1/5/10 Message-ID: Apologies for the delay in posting qual results: Si Etch depth 4880 Angstroms Si Etch Nonuniformity: 0.99% Si/Resist Selectivity: 3.75 This is recipe #1 with breakthrough=10 sec, main etch = 60 sec, overetch = 30 sec, following 10 dummy wafers. These results are normal following soon after a chamber clean. Raw data: Location Pre-Resist Post-Resist Si depth Top 9399 8191 4912 Center 9570 8240 4929 Flat 9547 8244 4823 Left 9548 8210 4902 Right 9540 8204 4834 From grahamab at snf.stanford.edu Sat Jan 16 13:19:11 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Sat, 16 Jan 2010 13:19:11 -0800 Subject: Shutdown lampoly SNF 2010-01-16 13:19:10: robot arm extension error Message-ID: ran cleaning recipe using a dummy wafer. when robot arm went to retrieve wafer, alarmed with a robot arm extension error and arm sensor check failure. From eenriquez at snf.stanford.edu Tue Jan 19 11:38:52 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:38:52 -0800 Subject: Comment lampoly SNF 2010-01-19 11:38:51: Update Message-ID: Unable to close the exit load locks inner door. From eenriquez at snf.stanford.edu Wed Jan 20 13:09:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jan 2010 13:09:21 -0800 Subject: Shutdown lampoly SNF 2010-01-16 13:19:10: robot arm extension error Message-ID: Rehomed the robot arm. Exit loadlock inner door was stuck open. Found the air line to close the door was leaking. Cut the damage piece and reseated. Cycled 4 wafers using recipe 99 with no problems. From eenriquez at snf.stanford.edu Wed Jan 20 13:09:32 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jan 2010 13:09:32 -0800 Subject: Comment lampoly SNF 2010-01-19 11:38:51: Update Message-ID: Archived From usha at snf.stanford.edu Wed Jan 20 14:39:21 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Wed, 20 Jan 2010 14:39:21 -0800 Subject: Comment lampoly SNF 2010-01-20 14:39:20: Backside He Pressure Message-ID: Backside He pressure low - Set pt 6T actual 1T or less. Elmer found that the He bottle was not opened all the way. Did nto imprve eve after he opened it all the way. From carterlin at snf.stanford.edu Wed Jan 20 17:17:20 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Wed, 20 Jan 2010 17:17:20 -0800 Subject: Shutdown lampoly SNF 2010-01-20 17:17:19: Alarm 18 Message-ID: Shuttle vaccume sense fails From eenriquez at snf.stanford.edu Thu Jan 21 10:21:12 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Jan 2010 10:21:12 -0800 Subject: Shutdown lampoly SNF 2010-01-20 17:17:19: Alarm 18 Message-ID: No problem found. Ran 11 wafers using recipe 1 with no problems. From eenriquez at snf.stanford.edu Thu Jan 21 10:21:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Jan 2010 10:21:42 -0800 Subject: Comment lampoly SNF 2010-01-20 14:39:20: Backside He Pressure Message-ID: Found the He valve at the wall was mostly closed. From tura at snf.stanford.edu Thu Jan 21 14:09:11 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 21 Jan 2010 14:09:11 -0800 Subject: Problem lampoly SNF 2010-01-21 14:09:11: He problem Message-ID: I noticed that He flow is ~35, while it used to be ~7. Also the bias is 60V, while it used to be around 110. Elmer says there could be something on the chuck to cause He leak, needs to open the chamber and look. From eenriquez at snf.stanford.edu Fri Jan 22 10:42:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Jan 2010 10:42:51 -0800 Subject: Problem lampoly SNF 2010-01-21 14:09:11: He problem Message-ID: Found two small wafer chips on the electrode. Wet cleaned the chamber and ran 11 wafers using recipe 1. Backside He flow is about 8 sccm, bias voltage = -120V. From linyoucao at snf.stanford.edu Sat Jan 23 12:20:55 2010 From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu) Date: Sat, 23 Jan 2010 12:20:55 -0800 Subject: Shutdown lampoly SNF 2010-01-23 12:20:55: Alarm 26: Load chuck vacuum failure Message-ID: Alarm 26: Load chuck vacuum failure. From cbaxter at snf.stanford.edu Sun Jan 24 10:12:48 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 24 Jan 2010 10:12:48 -0800 Subject: Shutdown lampoly SNF 2010-01-23 12:20:55: Alarm 26: Load chuck vacuum failure Message-ID: Shuttle load arm drive belt broke. Changed drive belt and re-cal home and load position. From rhenn at snf.stanford.edu Mon Jan 25 18:39:56 2010 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Mon, 25 Jan 2010 18:39:56 -0800 Subject: Problem lampoly SNF 2010-01-25 18:39:55: Shuttle vacuum sense fail Message-ID: Error = shuttle vacuum sense fail. Wafer is stuck at flat allignment. From tura at snf.stanford.edu Tue Jan 26 14:01:28 2010 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Tue, 26 Jan 2010 14:01:28 -0800 Subject: Shutdown lampoly SNF 2010-01-26 14:01:27: shuttle vacuum sense fail Message-ID: wafer stuck, machine is unusable, needs to be looked at From eenriquez at snf.stanford.edu Tue Jan 26 15:23:42 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Jan 2010 15:23:42 -0800 Subject: Comment lampoly SNF 2010-01-26 15:23:41: Update shuttle vacuum Message-ID: Shuttle vacuum problem was caused by dirty dummy wafers. Threw away all the dirty wafers. From eenriquez at snf.stanford.edu Tue Jan 26 15:24:41 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Jan 2010 15:24:41 -0800 Subject: Problem lampoly SNF 2010-01-26 15:24:41: Shuttle not initializing Message-ID: Shuttle is getting stuck during initialization. From eenriquez at snf.stanford.edu Wed Jan 27 15:09:15 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jan 2010 15:09:15 -0800 Subject: Problem lampoly SNF 2010-01-26 15:24:41: Shuttle not initializing Message-ID: Found the shuttle vacuum flex line was getting pinched by the shuttle drive mechanism during initialization. Installed a plastic guard over the drive assembly. Ran 8 new dummy wafers with no problems. From eenriquez at snf.stanford.edu Wed Jan 27 15:10:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jan 2010 15:10:00 -0800 Subject: Problem lampoly SNF 2010-01-25 18:39:55: Shuttle vacuum sense fail Message-ID: Threw away old dummy wafers. From eenriquez at snf.stanford.edu Wed Jan 27 15:10:05 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jan 2010 15:10:05 -0800 Subject: Shutdown lampoly SNF 2010-01-26 14:01:27: shuttle vacuum sense fail Message-ID: Threw away old dummy wafers. From eenriquez at snf.stanford.edu Wed Jan 27 15:10:14 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Jan 2010 15:10:14 -0800 Subject: Comment lampoly SNF 2010-01-26 15:23:41: Update shuttle vacuum Message-ID: Threw away old dummy wafers. From cursive at snf.stanford.edu Fri Jan 29 17:07:08 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 29 Jan 2010 17:07:08 -0800 Subject: Problem lampoly SNF 2010-01-29 17:07:07: error message Message-ID: #1 MFC auto zero error exceed 3 percent of full scale. Can someone fix it on weekend,? I am urgent to finish my process. Thanks! From cursive at snf.stanford.edu Fri Jan 29 17:22:31 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 29 Jan 2010 17:22:31 -0800 Subject: Problem lampoly SNF 2010-01-29 17:22:30: alarm 22 Message-ID: Exist arm failed requested extension actioin and wafer is stuck inside. From cursive at snf.stanford.edu Fri Jan 29 17:22:49 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 29 Jan 2010 17:22:49 -0800 Subject: Shutdown lampoly SNF 2010-01-29 17:22:49: error message above Message-ID: From cbaxter at snf.stanford.edu Sun Jan 31 18:50:05 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 31 Jan 2010 18:50:05 -0800 Subject: Problem lampoly SNF 2010-01-29 17:07:07: error message Message-ID: Zeroed the mfc From cbaxter at snf.stanford.edu Sun Jan 31 18:51:10 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 31 Jan 2010 18:51:10 -0800 Subject: Problem lampoly SNF 2010-01-29 17:22:30: alarm 22 Message-ID: Recovered wafer and initialize exit arm. From cbaxter at snf.stanford.edu Sun Jan 31 18:51:19 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 31 Jan 2010 18:51:19 -0800 Subject: Shutdown lampoly SNF 2010-01-29 17:22:49: error message above Message-ID: