Ran Quals with Poly, oxide and resist wafers on 1/8/2010 with recipe 1. Did not run Si wafer as I did not have a patterned Si wafer. Poly Loss: 5648A; Unif = 2.85% Resist Loss: 1327A; Unif = 4.94% Oxide Loss: 429A; Unif =8.04% Results comparable to Dec qual data.