Comment lampoly SNF 2010-01-11 11:05:48: Quals - 1/8/2010

usha at snf.stanford.edu usha at snf.stanford.edu
Mon Jan 11 11:05:50 PST 2010


Ran Quals with Poly, oxide and resist wafers on 1/8/2010 with recipe 1.  Did not run Si wafer as I did not have a patterned Si wafer.  
Poly Loss:  5648A; Unif = 2.85%
Resist Loss:  1327A; Unif = 4.94%
Oxide Loss:  429A; Unif =8.04%
Results comparable to Dec qual data.




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