Shutdown lampoly SNF 2010-01-16 13:19:10: robot arm extension error

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sat Jan 16 13:19:11 PST 2010


ran cleaning recipe using a dummy wafer.  when robot arm went to retrieve wafer, alarmed with a robot arm extension error and arm sensor check failure.  




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