Shutdown lampoly SNF 2010-01-16 13:19:10: robot arm extension error

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Sat Jan 16 13:19:11 PST 2010

Previous message: Comment lampoly SNF 2010-01-13 10:43:52: Etch quals from 1/5/10
Next message: Shutdown lampoly SNF 2010-01-16 13:19:10: robot arm extension error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

ran cleaning recipe using a dummy wafer.  when robot arm went to retrieve wafer, alarmed with a robot arm extension error and arm sensor check failure.

Previous message: Comment lampoly SNF 2010-01-13 10:43:52: Etch quals from 1/5/10
Next message: Shutdown lampoly SNF 2010-01-16 13:19:10: robot arm extension error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list