Shutdown lampoly SNF 2010-01-16 13:19:10: robot arm extension error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 20 13:09:21 PST 2010


Rehomed the robot arm.  Exit loadlock inner door was stuck open.  Found the air line to close the door was leaking.  Cut the damage piece and reseated.  Cycled  4 wafers using recipe 99 with no problems.




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