Problem lampoly SNF 2010-01-21 14:09:11: He problem

tura at snf.stanford.edu tura at snf.stanford.edu
Thu Jan 21 14:09:11 PST 2010


I noticed that He flow is ~35, while it used to be ~7. Also the bias is 60V, while it used to be around 110. Elmer says there could be something on the chuck to cause He leak, needs to open the chamber and look.




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