Problem lampoly SNF 2010-01-21 14:09:11: He problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 22 10:42:51 PST 2010


Found two small wafer chips on the electrode.  Wet cleaned the chamber and ran 11 wafers using recipe 1.  Backside He flow is about 8 sccm, bias voltage = -120V.  




More information about the lampoly-pcs mailing list