Comment lampoly SNF 2010-01-26 15:23:41: Update shuttle vacuum

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jan 26 15:23:42 PST 2010


Shuttle vacuum problem was caused by dirty dummy wafers.  Threw away all the dirty wafers.




More information about the lampoly-pcs mailing list