Problem lampoly SNF 2010-01-26 15:24:41: Shuttle not initializing

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 27 15:09:15 PST 2010


Found the shuttle vacuum flex line was getting pinched by the shuttle drive mechanism during initialization.  Installed a plastic guard over the drive assembly.  Ran 8 new dummy wafers with no problems.




More information about the lampoly-pcs mailing list