From filip at snf.stanford.edu Sat Jul 3 11:22:25 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sat, 3 Jul 2010 11:22:25 -0700 Subject: Comment lampoly SNF 2010-07-03 11:22:24: etsh rate Message-ID: 10 sec BT, 60 sec ME total Si depth 330nm Thus approx. etch rate 330nm/min From mtang at snf.stanford.edu Sat Jul 3 18:30:55 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 3 Jul 2010 18:30:55 -0700 Subject: Comment lampoly SNF 2010-07-03 18:30:55: Gas 4 is SF6 Message-ID: Sorry, following the loss of the hard drive, gas #4 is labeled as CF4 -- but it is really SF6. Recipes will also say CF4 -- remember, however, that it is really SF6. We will need to hook up the keyboard interface and reprogram. We'll probably do this in coming weeks, along with other work requiring system shutdown -- likely when the electrical for the new deposition tools to be located adjacent is done. From mtang at snf.stanford.edu Wed Jul 7 16:38:36 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 7 Jul 2010 16:38:36 -0700 Subject: Comment lampoly SNF 2010-07-07 16:38:35: Stuck wafer Message-ID: Alvin reported a stuck wafer in lampoly. The associated error was a problem with the flatfinder. The dummy wafer used looks normal. Wafer-cleanout was used to remove the stuck wafers. Alvin is trying some more dummies again. Please be aware of this as it may happen again. If so, please report and shutdown if necessary. From renshen at snf.stanford.edu Fri Jul 9 16:18:39 2010 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Fri, 9 Jul 2010 16:18:39 -0700 Subject: Comment lampoly SNF 2010-07-09 16:18:39: piece left in the process chamber Message-ID: I was doing a 30sec etch with a piece stuck to carrier using resist. The piece is left in the chamber after the etch. From eenriquez at snf.stanford.edu Mon Jul 12 12:51:34 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:51:34 -0700 Subject: Comment lampoly SNF 2010-07-09 16:18:39: piece left in the process chamber Message-ID: Removed wafer piece from the process chamber. Wiped down the electrode and ran 4 conditioning wafers. From eenriquez at snf.stanford.edu Mon Jul 12 12:52:27 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:52:27 -0700 Subject: Comment lampoly SNF 2010-04-21 11:37:28: Etch rate Data from 4/20/2010 Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:52:39 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:52:39 -0700 Subject: Comment lampoly SNF 2010-04-22 15:14:14: Needs process qual Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:52:50 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:52:50 -0700 Subject: Comment lampoly SNF 2010-05-14 13:10:48: Leak Rate test and Gas Cal Data Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:53:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:53:04 -0700 Subject: Comment lampoly SNF 2010-05-15 15:42:47: Wafers inside are dummy wafers Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:53:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:53:17 -0700 Subject: Comment lampoly SNF 2010-05-16 12:28:47: Please watch Cl2 Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:54:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:54:48 -0700 Subject: Comment lampoly SNF 2010-05-28 13:20:38: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:55:15 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:55:15 -0700 Subject: Comment lampoly SNF 2010-05-29 08:08:06: Floppy Drive Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:55:28 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:55:28 -0700 Subject: Comment lampoly SNF 2010-05-31 17:36:04: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:55:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:55:36 -0700 Subject: Comment lampoly SNF 2010-06-05 00:20:19: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:55:44 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:55:44 -0700 Subject: Comment lampoly SNF 2010-06-05 00:23:08: Upate Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:56:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:56:16 -0700 Subject: Problem lampoly SNF 2010-06-05 00:42:57: aaaa Message-ID: From eenriquez at snf.stanford.edu Mon Jul 12 12:56:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:56:29 -0700 Subject: Comment lampoly SNF 2010-06-05 02:37:29: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:56:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:56:47 -0700 Subject: Comment lampoly SNF 2010-06-15 15:18:24: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:57:13 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:57:13 -0700 Subject: Comment lampoly SNF 2010-06-17 08:50:22: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:57:22 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:57:22 -0700 Subject: Comment lampoly SNF 2010-06-17 16:53:41: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:57:29 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:57:29 -0700 Subject: Comment lampoly SNF 2010-06-18 16:35:52: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:57:45 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:57:45 -0700 Subject: Comment lampoly SNF 2010-06-19 13:45:17: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:57:59 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:57:59 -0700 Subject: Comment lampoly SNF 2010-06-21 12:25:26: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:58:13 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:58:13 -0700 Subject: Comment lampoly SNF 2010-06-21 13:35:03: Testing Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:58:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:58:36 -0700 Subject: Comment lampoly SNF 2010-06-21 16:45:44: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:58:54 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:58:54 -0700 Subject: Comment lampoly SNF 2010-06-22 13:38:29: Lampoly up - recipes need re-entering Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 12 12:59:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Jul 2010 12:59:19 -0700 Subject: Comment lampoly SNF 2010-06-22 14:46:11: Top RF Reflected power Message-ID: Archived From daesung at snf.stanford.edu Tue Jul 13 11:15:27 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Tue, 13 Jul 2010 11:15:27 -0700 Subject: Problem lampoly SNF 2010-07-13 11:15:27: Wafer handling problem Message-ID: Wafer not sensed at exit cassette during the seasoning with test wafers. Wafers stuck inside. From daesung at snf.stanford.edu Tue Jul 13 11:21:58 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Tue, 13 Jul 2010 11:21:58 -0700 Subject: Problem lampoly SNF 2010-07-13 11:21:57: Gas box disabled Message-ID: Due to failure of pump or external scrubber. The problem was caused by the wafer sensing issue reported earlier. From daesung at snf.stanford.edu Tue Jul 13 11:26:50 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Tue, 13 Jul 2010 11:26:50 -0700 Subject: Comment lampoly SNF 2010-07-13 11:26:49: All the previous problems resolved Message-ID: From cbaxter at snf.stanford.edu Wed Jul 14 08:41:10 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Jul 2010 08:41:10 -0700 Subject: Problem lampoly SNF 2010-07-13 11:21:57: Gas box disabled Message-ID: From cbaxter at snf.stanford.edu Wed Jul 14 08:41:17 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Jul 2010 08:41:17 -0700 Subject: Problem lampoly SNF 2010-07-13 11:15:27: Wafer handling problem Message-ID: From tberg at snf.stanford.edu Mon Jul 19 06:47:08 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Jul 2010 06:47:08 -0700 Subject: Shutdown lampoly SNF 2010-07-19 06:47:07: Power move Message-ID: From tberg at snf.stanford.edu Mon Jul 19 13:49:43 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Jul 2010 13:49:43 -0700 Subject: Shutdown lampoly SNF 2010-07-19 06:47:07: Power move Message-ID: Power move completed. Needs checkout/startup From tberg at snf.stanford.edu Mon Jul 19 13:50:13 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 19 Jul 2010 13:50:13 -0700 Subject: Problem lampoly SNF 2010-07-19 13:50:13: Needs startup after power move Message-ID: Power move completed. Needs checkout/startup From eenriquez at snf.stanford.edu Mon Jul 19 15:16:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 19 Jul 2010 15:16:10 -0700 Subject: Shutdown lampoly SNF 2010-07-19 15:16:10: Need to install HD Message-ID: Need to install the hard drive. From mtang at snf.stanford.edu Mon Jul 19 16:09:58 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 19 Jul 2010 16:09:58 -0700 Subject: Comment lampoly SNF 2010-07-19 16:09:58: System will be down a little longer Message-ID: Plans: 1. Replace backup battery (lithium AA) on the SRAM-1 board (slot #13). 2. Image the hard drive. 3. Re-mount the working floppy drive (so it's accessible in front). 4. Connect keyboard to reprogram gas name CF4 to SF6. 5. Copy current recipes to the hard drive. From mtang at snf.stanford.edu Tue Jul 20 12:12:42 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 20 Jul 2010 12:12:42 -0700 Subject: Comment lampoly SNF 2010-07-19 16:09:58: System will be down a little longer Message-ID: Not as successful as hoped, but some progress made. #1- Backup battery not change - Need to find the appropriate type. #2 - Spare hard drive acquired, formatted and updated. #3 - Working floppy drive mounted. #4 - Gas #4 (actually SF6) is named "4" for now. Alphanumeric keyboard connection may not be working. #5 - Current recipes are on the hard drive and backed up on floppy. From cbaxter at snf.stanford.edu Tue Jul 20 12:36:56 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Jul 2010 12:36:56 -0700 Subject: Shutdown lampoly SNF 2010-07-19 15:16:10: Need to install HD Message-ID: Hard drive is installed and system is powered back up.. From cbaxter at snf.stanford.edu Tue Jul 20 12:37:09 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Jul 2010 12:37:09 -0700 Subject: Problem lampoly SNF 2010-07-19 13:50:13: Needs startup after power move Message-ID: From mtang at snf.stanford.edu Tue Jul 20 13:05:12 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 20 Jul 2010 13:05:12 -0700 Subject: Comment lampoly SNF 2010-07-20 13:05:11: Message-ID: From mtang at snf.stanford.edu Tue Jul 20 13:11:04 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 20 Jul 2010 13:11:04 -0700 Subject: Problem lampoly SNF 2010-07-20 13:11:03: RF Power stability Message-ID: The top RF seems to be less stable than usual and tuning isn't as quick as it should be. On recipe #1, the top RF is 250 W, but fluctuates by up to 10 W up and down. On the breakthrough and overetches, the top RF reflected power tunes in nicely, nontheless. On the main etch, however, the top reflected power fluctuates from 2-20W for about 20 seconds before tuning and stablizing. When top RF power is set higher (300W) as in the clean recipe #99, it tunes well and is stable. The system is still quite usable, but if you have a critical etch, make sure to check the top RF stability in the recipe used. Will continue to investigate the stability/tuning problem. From mtang at snf.stanford.edu Tue Jul 20 13:49:34 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 20 Jul 2010 13:49:34 -0700 Subject: Comment lampoly SNF 2010-07-20 13:49:33: Correction Message-ID: Cesar adjusted the tap on the RF match slightly. It tunes in the main etch in about 7 seconds now. From eenriquez at snf.stanford.edu Wed Jul 21 08:13:49 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jul 2010 08:13:49 -0700 Subject: Comment lampoly SNF 2010-07-20 13:05:11: Message-ID: Archived From carterlin at snf.stanford.edu Wed Jul 21 22:54:25 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Wed, 21 Jul 2010 22:54:25 -0700 Subject: Problem lampoly SNF 2010-07-21 22:54:25: 2cm^2 piece left inside chamber Message-ID: the piece came off the carrier wafer From mtang at snf.stanford.edu Thu Jul 22 05:28:08 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 22 Jul 2010 05:28:08 -0700 Subject: Shutdown lampoly SNF 2010-07-22 05:28:07: Piece reported inside the chamber Message-ID: Shut down to allow this to be removed, as it may interferes with wafer clamping and may lead to breakage. From eenriquez at snf.stanford.edu Thu Jul 22 13:15:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 13:15:30 -0700 Subject: Problem lampoly SNF 2010-07-21 22:54:25: 2cm^2 piece left inside chamber Message-ID: Removed wafer piece and ran conditioning wafers. From eenriquez at snf.stanford.edu Thu Jul 22 13:16:23 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jul 2010 13:16:23 -0700 Subject: Shutdown lampoly SNF 2010-07-22 05:28:07: Piece reported inside the chamber Message-ID: Removed wafer piece and ran conditioning wafers. From usha at snf.stanford.edu Thu Jul 22 15:18:39 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 22 Jul 2010 15:18:39 -0700 Subject: Problem lampoly SNF 2010-07-22 15:18:38: Loadlock pumpdown failure Message-ID: Fixed tuning issues in recipe 99. Trying to optiimize recipe 80. Wafers stuck due to load lock pumping issues. From usha at snf.stanford.edu Fri Jul 23 10:03:13 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Fri, 23 Jul 2010 10:03:13 -0700 Subject: Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure Message-ID: Wafers are dummy wafers. From eenriquez at snf.stanford.edu Fri Jul 23 14:03:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jul 2010 14:03:56 -0700 Subject: Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure Message-ID: Manually pumped down the load lock and reset the alarms. Ran 2 wafers with no problems. From eenriquez at snf.stanford.edu Fri Jul 23 14:04:36 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jul 2010 14:04:36 -0700 Subject: Problem lampoly SNF 2010-07-22 15:18:38: Loadlock pumpdown failure Message-ID: Manually pumped down the load lock and reset the alarms. Ran 2 wafers with no problems. From carterlin at snf.stanford.edu Sun Jul 25 17:21:29 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Sun, 25 Jul 2010 17:21:29 -0700 Subject: Shutdown lampoly SNF 2010-07-25 17:21:29: A piece comes off carrier wafer Message-ID: Sorry about it From cbaxter at snf.stanford.edu Mon Jul 26 08:55:42 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 26 Jul 2010 08:55:42 -0700 Subject: Shutdown lampoly SNF 2010-07-25 17:21:29: A piece comes off carrier wafer Message-ID: Vented chamber and removed wafer chip. Wiped down chamber water and ipa, cycled ran using recipe#1. From eenriquez at snf.stanford.edu Thu Jul 29 14:49:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 29 Jul 2010 14:49:51 -0700 Subject: Comment lampoly SNF 2010-07-29 14:49:51: Test after after power outtage Message-ID: Turned chiller back on and rezeroed the manometer. Ran 4 wafers using recipe 1 with no problems. From daesung at snf.stanford.edu Fri Jul 30 21:31:51 2010 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Fri, 30 Jul 2010 21:31:51 -0700 Subject: Problem lampoly SNF 2010-07-30 21:31:45: Exit arm failed request action extension Message-ID: One processing wafer of mine is stuck inside. From cursive at snf.stanford.edu Sat Jul 31 12:33:47 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 31 Jul 2010 12:33:47 -0700 Subject: Shutdown lampoly SNF 2010-07-31 12:33:46: exit aram problem Message-ID: last user forget to shut down the machine....