Comment lampoly SNF 2010-07-09 16:18:39: piece left in the process chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 12 12:51:34 PDT 2010


Removed wafer piece from the process chamber.  Wiped down the electrode and ran 4 conditioning wafers.




More information about the lampoly-pcs mailing list