Problem lampoly SNF 2010-07-20 13:11:03: RF Power stability

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Jul 20 13:11:04 PDT 2010


The top RF seems to be less stable than usual and tuning isn't as quick as it should be.  On recipe #1, the top RF is 250 W, but fluctuates by up to 10 W up and down.  On the breakthrough and overetches, the top RF reflected power tunes in nicely, nontheless.  On the main etch, however, the top reflected power fluctuates from 2-20W for about 20 seconds before tuning and stablizing.  
When top RF power is set higher (300W) as in the clean recipe #99, it tunes well and is stable.
The system is still quite usable, but if you have a critical etch, make sure to check the top RF stability in the recipe used.
Will continue to investigate the stability/tuning problem. 




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