Problem lampoly SNF 2010-07-22 15:18:38: Loadlock pumpdown failure

usha at snf.stanford.edu usha at snf.stanford.edu
Thu Jul 22 15:18:39 PDT 2010

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Fixed tuning issues in recipe 99.  Trying to optiimize recipe 80.  Wafers stuck due to load lock pumping issues.

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