Problem lampoly SNF 2010-07-22 15:18:38: Loadlock pumpdown failure

usha at snf.stanford.edu usha at snf.stanford.edu
Thu Jul 22 15:18:39 PDT 2010


Fixed tuning issues in recipe 99.  Trying to optiimize recipe 80.  Wafers stuck due to load lock pumping issues.




More information about the lampoly-pcs mailing list