Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure

usha at snf.stanford.edu usha at snf.stanford.edu
Fri Jul 23 10:03:13 PDT 2010

Previous message: Problem lampoly SNF 2010-07-22 15:18:38: Loadlock pumpdown failure
Next message: Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Wafers are dummy wafers.

Previous message: Problem lampoly SNF 2010-07-22 15:18:38: Loadlock pumpdown failure
Next message: Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list