Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 23 14:03:56 PDT 2010


Manually pumped down the load lock and reset the alarms.  Ran 2 wafers with no problems.




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