Shutdown lampoly SNF 2010-07-25 17:21:29: A piece comes off carrier wafer
carterlin at snf.stanford.edu
carterlin at snf.stanford.edu
Sun Jul 25 17:21:29 PDT 2010
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Shutdown lampoly SNF 2010-07-25 17:21:29: A piece comes off carrier wafer
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Sorry about it
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Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure
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Shutdown lampoly SNF 2010-07-25 17:21:29: A piece comes off carrier wafer
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