Shutdown lampoly SNF 2010-07-25 17:21:29: A piece comes off carrier wafer

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Jul 26 08:55:42 PDT 2010


Vented chamber and removed wafer chip. Wiped down chamber
water and ipa,  cycled ran using recipe#1.




More information about the lampoly-pcs mailing list