Comment lampoly SNF 2010-07-29 14:49:51: Test after after power outtage
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Jul 29 14:49:51 PDT 2010
Turned chiller back on and rezeroed the manometer. Ran 4 wafers using recipe 1 with no problems.
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