July 2010 Archives by author

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Starting: Sat Jul 3 11:22:25 PDT 2010
Ending: Sat Jul 31 12:33:47 PDT 2010
Messages: 57

• Problem lampoly SNF 2010-07-21 22:54:25: 2cm^2 piece left inside chamber   carterlin at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-25 17:21:29: A piece comes off carrier wafer   carterlin at snf.stanford.edu
• Problem lampoly SNF 2010-07-13 11:21:57: Gas box disabled   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2010-07-13 11:15:27: Wafer handling problem   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-19 15:16:10: Need to install HD   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2010-07-19 13:50:13: Needs startup after power move   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-25 17:21:29: A piece comes off carrier wafer   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-31 12:33:46: exit aram problem   cursive at snf.stanford.edu
• Problem lampoly SNF 2010-07-13 11:15:27: Wafer handling problem   daesung at snf.stanford.edu
• Problem lampoly SNF 2010-07-13 11:21:57: Gas box disabled   daesung at snf.stanford.edu
• Comment lampoly SNF 2010-07-13 11:26:49: All the previous problems resolved   daesung at snf.stanford.edu
• Problem lampoly SNF 2010-07-30 21:31:45: Exit arm failed request action extension   daesung at snf.stanford.edu
• Comment lampoly SNF 2010-07-09 16:18:39: piece left in the process chamber   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-04-21 11:37:28: Etch rate Data from 4/20/2010   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-04-22 15:14:14: Needs process qual   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-05-14 13:10:48: Leak Rate test and Gas Cal Data   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-05-15 15:42:47: Wafers inside are dummy wafers   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-05-16 12:28:47: Please watch Cl2   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-05-28 13:20:38: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-05-29 08:08:06: Floppy Drive   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-05-31 17:36:04: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-05 00:20:19: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-05 00:23:08: Upate   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-06-05 00:42:57: aaaa   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-05 02:37:29: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-15 15:18:24: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-17 08:50:22: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-17 16:53:41: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-18 16:35:52: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-19 13:45:17: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-21 12:25:26: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-21 13:35:03: Testing   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-21 16:45:44: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-22 13:38:29: Lampoly up - recipes need re-entering   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-06-22 14:46:11: Top RF Reflected power   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-19 15:16:10: Need to install HD   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-07-20 13:05:11:   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-07-21 22:54:25: 2cm^2 piece left inside chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-22 05:28:07: Piece reported inside the chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2010-07-22 15:18:38: Loadlock pumpdown failure   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-07-29 14:49:51: Test after after power outtage   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-07-03 11:22:24: etsh rate   filip at snf.stanford.edu
• Comment lampoly SNF 2010-07-03 18:30:55: Gas 4 is SF6   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-07-07 16:38:35: Stuck wafer   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-07-19 16:09:58: System will be down a little longer   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-07-19 16:09:58: System will be down a little longer   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-07-20 13:05:11:   mtang at snf.stanford.edu
• Problem lampoly SNF 2010-07-20 13:11:03: RF Power stability   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-07-20 13:49:33: Correction   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-22 05:28:07: Piece reported inside the chamber   mtang at snf.stanford.edu
• Comment lampoly SNF 2010-07-09 16:18:39: piece left in the process chamber   renshen at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-19 06:47:07: Power move   tberg at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-19 06:47:07: Power move   tberg at snf.stanford.edu
• Problem lampoly SNF 2010-07-19 13:50:13: Needs startup after power move   tberg at snf.stanford.edu
• Problem lampoly SNF 2010-07-22 15:18:38: Loadlock pumpdown failure   usha at snf.stanford.edu
• Shutdown lampoly SNF 2010-07-23 10:03:13: Wafers stuck due to load lock pump down failure   usha at snf.stanford.edu

Last message date: Sat Jul 31 12:33:47 PDT 2010
Archived on: Sun Dec 23 09:06:14 PST 2012

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