From cbaxter at snf.stanford.edu Sat Jun 5 00:20:20 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 00:20:20 -0700 Subject: Comment lampoly SNF 2010-06-05 00:20:19: Update Message-ID: The heat exchange, load arm, entrance and exit load lock are ok and initialize. Problem with main chamber can't read chamber pressure. Still troubleshooting... From cbaxter at snf.stanford.edu Sat Jun 5 00:23:08 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 00:23:08 -0700 Subject: Comment lampoly SNF 2010-06-05 00:23:08: Upate Message-ID: From cbaxter at snf.stanford.edu Sat Jun 5 00:42:43 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 00:42:43 -0700 Subject: Shutdown lampoly SNF 2010-06-05 00:42:43: Update Message-ID: From cbaxter at snf.stanford.edu Sat Jun 5 00:42:58 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 00:42:58 -0700 Subject: Problem lampoly SNF 2010-06-05 00:42:57: aaaa Message-ID: From cbaxter at snf.stanford.edu Sat Jun 5 02:37:29 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 5 Jun 2010 02:37:29 -0700 Subject: Comment lampoly SNF 2010-06-05 02:37:29: Update Message-ID: Working on pressure readout From mtang at snf.stanford.edu Thu Jun 10 07:47:15 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 10 Jun 2010 07:47:15 -0700 Subject: Comment lampoly SNF 2010-06-10 07:47:14: Update Message-ID: As per Elmer, a new manometer has been ordered and should be here, possibly today, probably tomorrow. From eenriquez at snf.stanford.edu Mon Jun 14 08:41:12 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jun 2010 08:41:12 -0700 Subject: Comment lampoly SNF 2010-06-10 07:47:14: Update Message-ID: The manometer has been installed by Ceasar. From eenriquez at snf.stanford.edu Tue Jun 15 15:18:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jun 2010 15:18:24 -0700 Subject: Comment lampoly SNF 2010-06-15 15:18:24: Update Message-ID: Defective pressure controller (no pressure out). Found a replacement pressure controller online. Waiting for verification about the interface before ordering. From cbaxter at snf.stanford.edu Thu Jun 17 08:50:22 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 Jun 2010 08:50:22 -0700 Subject: Comment lampoly SNF 2010-06-17 08:50:22: Update Message-ID: Still working on getting another Vat controller replacement, currently in contact with a vendor in Texas there in process of testing a recondition Vat controller, if the controller check out good will have it shipped overnight. From mtang at snf.stanford.edu Thu Jun 17 16:53:41 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 17 Jun 2010 16:53:41 -0700 Subject: Comment lampoly SNF 2010-06-17 16:53:41: Update Message-ID: As of now, the VAT controller is due to arrive late Friday morning. We are still working on the hard drive, which had failed. The system seems to be functional, but calibrations and recipes will likely need to be redone and re-entered if we cannot recover these files. However, we now have a means of backup (thanks to Cesar and Berkeley). It may take a day or two to complete calibrations and recipe checkout. From mtang at snf.stanford.edu Fri Jun 18 16:35:53 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 18 Jun 2010 16:35:53 -0700 Subject: Comment lampoly SNF 2010-06-18 16:35:52: Update Message-ID: Good news and bad. Good news is that the VAT controller arrived. The batteries were leaking so were replaced, thanks to Ted & Ray. Once installed, the system recognized and started controlling pressure. Hooray. Bad news#1. The hard drive has some real problems. Files can be read and saved, but anomolous files of large size also pop up. Can't seem to invoke the format hard drive feature to work. We should probably try the drive from Berkeley. However, we can run off the floppy in the meantime (now that we have a functioning floppy). Because we haven't had a functioning floppy drive for so long, recipes have not been updated in many years. They will have to be re-entered. Luckily, this is more of matter of time and inconvenience rather than a showstopper. It looks like some wafer transfer parameters may also need to be recalibrated. Most other parameters reside in SRAM so are OK. Bad news #2, Gas flow checks are off by about 35%. Since all foour of the gases checked are off by the same amount, I wonder if the calibration of the manometer is off? I could not find a configuration parameter that might specify the range, so it might not be something lost with the harddrive files. Is it possible there is a referenc So, first, it would probably be a good idea to check the calibration of the new manometer. Second, we should check the wafer hand-off and gap cals. We should also check the MFC cal to make sure they are within reason. We'll also need to re-enter and check presets on recipes. More to follow -- Mary From mtang at snf.stanford.edu Sat Jun 19 13:45:17 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 19 Jun 2010 13:45:17 -0700 Subject: Comment lampoly SNF 2010-06-19 13:45:17: Update Message-ID: Just trying to run the system. Some of the calibration and configuration parameters are up to date, because they are saved in memory across several boards. Much of the original configuration info from the archived files is the same. However, some parameters are evidently lost and revert to default. Maybe those on a specified board/chip? MFC's: They are OK. The default chamber configuration size is apparently off by 35%. Once the update/correction is made, the MFC's look good. Gap: Gap was checked. (The endpoint detector was removed to inspect this.) Gap index changed 256 from 7100 (default) to 6496 (from cal last summer, confirmed today). Rotation: changed index 311 from 198 to 204 (as per Usha's check last summer. Tried running a wafer. Had to change index 475 (xover gas flow) to 0. Pressure is unstable. Need to teach the VAT controller at process pressure. He backside looks good. Exit arm stuck in cassette. Entrance is OK. Exit loadlock wafer handling needs to be re-calibrated. A couple other things to check: - software limit switch on gap should be set at 5.6 cm. - Recipe 1 was entered on the hard drive. No other recipes have been entered. Other recipes on the floppy are much outdated and should not be used. Presets for the VAT need to be adjusted following VAT controller teaching. RF presets should be double-checked. (Presets from late last year were entered.) Nearly there.... From cbaxter at snf.stanford.edu Mon Jun 21 12:25:27 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 21 Jun 2010 12:25:27 -0700 Subject: Comment lampoly SNF 2010-06-21 12:25:26: Update Message-ID: Calibrating throttle valve and wafer alignment in progress.. From mtang at snf.stanford.edu Mon Jun 21 13:35:03 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 21 Jun 2010 13:35:03 -0700 Subject: Comment lampoly SNF 2010-06-21 13:35:03: Testing Message-ID: System seems to work, in general. Saving recipes works only intemittently. It looks like the door between the exit loadlock and the chamber isn't sealing very tightly. When the exit loadlock is at atmosphere, it holds well, but when it's pumping down or venting, N2 leaks into the chamber. (Symptoms: pressure goes out of control and plasma is orangey pink.) However, pressure controls well (when exit loadlock is at ATM.) RF tuning isn't quite as consistent as I'd like, but reflected power is within 15%. More testing and troubleshooting needed, but getting there... From mtang at snf.stanford.edu Mon Jun 21 16:45:44 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 21 Jun 2010 16:45:44 -0700 Subject: Comment lampoly SNF 2010-06-21 16:45:44: Update Message-ID: The system is working, somewhat. More work needed. Elmer adjusted the exit load lock/chamber door, but it still seems to leak. However, if you run one wafer and wait for the loadlocks to reach ATM, the process runs fine (plasma looks beautiful.) Still cannot save recipes, so only recipe #1 is loaded with its presets. From mtang at snf.stanford.edu Tue Jun 22 13:36:50 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 22 Jun 2010 13:36:50 -0700 Subject: Shutdown lampoly SNF 2010-05-24 12:02:45: Hardrive Error Message-ID: Hard drive replaced. Also, drive interface card. Floppy drive is inside the headcase (not accessible, but working well.) Wafer dust prevented the exit loadlock door from sealing properly. Cesar cleaned and realigned. VAT controller was taught again. Running wafers now. Qual still needs to be done. Many recipes were lost. Recipes loaded and checked are #1, 2, 25, 77, 90, and 99. Please double-check these recipes before you use. If you enter in new recipes, make sure to check that the tolerances (key "3" on the Recipe page) and the presets (key "7" on the recipe page) are set. Alternatively, you can edit an existing recipe which is similar in flow rate and pressure to yours (using the same presets and tolerances,) See the wiki. Recipes will default to saving on the floppy. From mtang at snf.stanford.edu Tue Jun 22 13:36:57 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 22 Jun 2010 13:36:57 -0700 Subject: Shutdown lampoly SNF 2010-06-05 00:42:43: Update Message-ID: Hard drive replaced. Also, drive interface card. Floppy drive is inside the headcase (not accessible, but working well.) Wafer dust prevented the exit loadlock door from sealing properly. Cesar cleaned and realigned. VAT controller was taught again. Running wafers now. Qual still needs to be done. Many recipes were lost. Recipes loaded and checked are #1, 2, 25, 77, 90, and 99. Please double-check these recipes before you use. If you enter in new recipes, make sure to check that the tolerances (key "3" on the Recipe page) and the presets (key "7" on the recipe page) are set. Alternatively, you can edit an existing recipe which is similar in flow rate and pressure to yours (using the same presets and tolerances,) See the wiki. Recipes will default to saving on the floppy. From mtang at snf.stanford.edu Tue Jun 22 13:38:29 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 22 Jun 2010 13:38:29 -0700 Subject: Comment lampoly SNF 2010-06-22 13:38:29: Lampoly up - recipes need re-entering Message-ID: Drives replaced. Qual still needs to be done. Many recipes were lost. Recipes loaded and checked are #1, 2, 25, 77, 90, and 99. Please double-check these recipes before you use. If you enter in new recipes, make sure to check that the tolerances (key "3" on the Recipe page) and the presets (key "7" on the recipe page) are set. Alternatively, you can edit an existing recipe which is similar in flow rate and pressure to yours (using the same presets and tolerances,) See the wiki. Recipes will default to saving on the floppy. From mtang at snf.stanford.edu Tue Jun 22 14:46:12 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 22 Jun 2010 14:46:12 -0700 Subject: Comment lampoly SNF 2010-06-22 14:46:11: Top RF Reflected power Message-ID: Top electrode reflected power is high on main etch (step 5) for all recipes. Played around with presets, so that it tunes in about 8 seconds (versus 15) and variation is no more than 15 (versus 30 W). Not sure why this is so -- the recipes tuned very nicely up until today and it's just the main etch. From usha at snf.stanford.edu Mon Jun 28 11:41:11 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Mon, 28 Jun 2010 11:41:11 -0700 Subject: Comment lampoly SNF 2010-06-28 11:41:11: Lampoly ER Data - 6/25/10 Message-ID: Recipe used = Recipe 1 - 10 s BT; 60s Me; 30s OE Si Loss = 5132A; Unif. = 1.95% Poly Loss = 5503A; Unif. = 0.72% Thermal Oxide Loss = 356A; Unif. = 6.46% PR Loss (1um, 3612 resist) = 1440A; Unif. = 3.65% Si:Oxide Sel = 14.4 Si:PR Sel = 3.56