From usha at snf.stanford.edu Thu Mar 4 14:18:30 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 4 Mar 2010 14:18:30 -0800 Subject: Problem lampoly SNF 2010-03-04 14:18:29: Shuttle vacuum sense failed Message-ID: Shuttle vacuum sense failed. Is False - Should be True. Tried to reset. Could not. Was running qual using recipe 1. Also, anotehr problem: Ran 3 dummies -on 4th and 5th wafer, alarmed for turbo pumping system state not ready for process to start - Pressur exceeds 3T in chamber during turbo pumping state - after a few minutes alarm went away and was able to resume processing. From usha at snf.stanford.edu Thu Mar 4 14:29:33 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 4 Mar 2010 14:29:33 -0800 Subject: Shutdown lampoly SNF 2010-03-04 14:29:32: Shuttle vaccum sense fail Message-ID: From eenriquez at snf.stanford.edu Fri Mar 5 12:25:28 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 5 Mar 2010 12:25:28 -0800 Subject: Shutdown lampoly SNF 2010-03-04 14:29:32: Shuttle vaccum sense fail Message-ID: Reset the shuttle and ran 6 wafers. From cbaxter at snf.stanford.edu Sat Mar 6 18:23:12 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Mar 2010 18:23:12 -0800 Subject: Problem lampoly SNF 2010-03-04 14:18:29: Shuttle vacuum sense failed Message-ID: Cycled system and could not dupiicate error.. From usha at snf.stanford.edu Tue Mar 9 11:55:47 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Tue, 9 Mar 2010 11:55:47 -0800 Subject: Comment lampoly SNF 2010-03-09 11:55:47: Etch Quals from 3/6/2010 Message-ID: Recipe 1: 10s BT, 60s ME, 30s OE; Ave loss & Uniformity - 5pt measurement; Unif = (max-min)/2*Ave loss Si Loss - 5143A; Unif -1.81% Oxide Loss - 402A; Unif. - 11.3% Resist Loss - 1404A; Unif - 3.74% Poly Loss - 6610A; Unif - 1.32% Si/ PR Sel = 3.66 Si/ Oxide Sel = 12.79 From eenriquez at snf.stanford.edu Wed Mar 10 14:02:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Mar 2010 14:02:16 -0800 Subject: Comment lampoly SNF 2010-03-10 14:02:16: Maintenance work Message-ID: Chiller resistivity was decreasing (1.3 mohm). Unclogged the water line to the DI cartridge. Now resistivity is 1.8 mohm and increasing. From eenriquez at snf.stanford.edu Thu Mar 18 14:54:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Mar 2010 14:54:51 -0700 Subject: Shutdown lampoly SNF 2010-03-18 14:54:51: Chiller leak Message-ID: Chiller has a large water leak. From eenriquez at snf.stanford.edu Fri Mar 19 09:15:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Mar 2010 09:15:00 -0700 Subject: Shutdown lampoly SNF 2010-03-18 14:54:51: Chiller leak Message-ID: Repaired the chiller leak (replaced a fast&tight fitting). Ran 4 wafers using recipe1 with no problems. From rhenn at snf.stanford.edu Fri Mar 19 11:08:56 2010 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Fri, 19 Mar 2010 11:08:56 -0700 Subject: Problem lampoly SNF 2010-03-19 11:08:55: shuttle vacuum sense fail Message-ID: Recieved error that shuttle vacuum sense failed (sensor false should be true) when running lampoly dummies. From eenriquez at snf.stanford.edu Fri Mar 19 14:55:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Mar 2010 14:55:56 -0700 Subject: Problem lampoly SNF 2010-03-19 11:08:55: shuttle vacuum sense fail Message-ID: Cleaned the shuttle arm. Cycled 4 wafers. From jaehlee at snf.stanford.edu Fri Mar 26 14:45:31 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Fri, 26 Mar 2010 14:45:31 -0700 Subject: Problem lampoly SNF 2010-03-26 14:45:31: piece dropped inside the chamber Message-ID: dummy piece didn't come out from the chamber. From cursive at snf.stanford.edu Fri Mar 26 16:09:05 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 26 Mar 2010 16:09:05 -0700 Subject: Problem lampoly SNF 2010-03-26 16:09:04: low elect temperature Message-ID: set point is 60, but it's 22. From mtang at snf.stanford.edu Fri Mar 26 16:26:45 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 26 Mar 2010 16:26:45 -0700 Subject: Shutdown lampoly SNF 2010-03-26 16:26:44: Dropped piece and electrode temp Message-ID: The dropped piece could potentially interfere with wafer clamping so the chamber needs to be purged and opened to remove it. The low electrode temperature will lead to poor etching. If the recipe and standby temperatures are at 60, then it is likely a heat exchanger problem. In any case, the system should not be used until these two issues are addressed because the etch quality will be badly affected. From cbaxter at snf.stanford.edu Fri Mar 26 16:36:26 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 26 Mar 2010 16:36:26 -0700 Subject: Shutdown lampoly SNF 2010-03-26 16:26:44: Dropped piece and electrode temp Message-ID: Vented chamber and removed piece of broken wafer chip. From cbaxter at snf.stanford.edu Fri Mar 26 16:36:45 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 26 Mar 2010 16:36:45 -0700 Subject: Problem lampoly SNF 2010-03-26 16:09:04: low elect temperature Message-ID: Temp is back at 60C. From cbaxter at snf.stanford.edu Fri Mar 26 16:36:50 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 26 Mar 2010 16:36:50 -0700 Subject: Problem lampoly SNF 2010-03-26 14:45:31: piece dropped inside the chamber Message-ID: From chienyuc at snf.stanford.edu Mon Mar 29 20:18:02 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Mon, 29 Mar 2010 20:18:02 -0700 Subject: Problem lampoly SNF 2010-03-29 20:18:01: Alarm 58: Load Lock arm failed initialize Message-ID: Not able to initialize the machine. From eenriquez at snf.stanford.edu Wed Mar 31 09:53:27 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Mar 2010 09:53:27 -0700 Subject: Problem lampoly SNF 2010-03-29 20:18:01: Alarm 58: Load Lock arm failed initialize Message-ID: Initialized load lock arm and cycled 3 wafers.