Problem lampoly SNF 2010-03-04 14:18:29: Shuttle vacuum sense failed

[usha at snf.stanford.edu]

Shuttle vacuum sense failed.  Is False - Should be True.  Tried to reset.  Could not.  Was running qual using recipe 1.
Also, anotehr problem:  Ran 3 dummies -on 4th and 5th wafer, alarmed for turbo pumping system state not ready for process to start - Pressur exceeds 3T in chamber during turbo pumping state - after a few minutes alarm went away and was able to resume processing.