Problem lampoly SNF 2010-03-04 14:18:29: Shuttle vacuum sense failed

usha at snf.stanford.edu usha at snf.stanford.edu
Thu Mar 4 14:18:30 PST 2010


Shuttle vacuum sense failed.  Is False - Should be True.  Tried to reset.  Could not.  Was running qual using recipe 1.
Also, anotehr problem:  Ran 3 dummies -on 4th and 5th wafer, alarmed for turbo pumping system state not ready for process to start - Pressur exceeds 3T in chamber during turbo pumping state - after a few minutes alarm went away and was able to resume processing.




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