Comment lampoly SNF 2010-03-09 11:55:47: Etch Quals from 3/6/2010

usha at snf.stanford.edu usha at snf.stanford.edu
Tue Mar 9 11:55:47 PST 2010


Recipe 1: 10s BT, 60s ME, 30s OE; 
Ave loss & Uniformity - 5pt measurement; Unif = (max-min)/2*Ave loss
Si Loss - 5143A; Unif  -1.81%
Oxide Loss - 402A; Unif. - 11.3%
Resist Loss - 1404A; Unif - 3.74%
Poly Loss - 6610A; Unif - 1.32%
Si/ PR Sel = 3.66
Si/ Oxide Sel = 12.79




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