Shutdown lampoly SNF 2010-03-18 14:54:51: Chiller leak

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 19 09:15:00 PDT 2010


Repaired the chiller leak (replaced a fast&tight fitting).  Ran 4 wafers using recipe1 with no problems.




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