Problem lampoly SNF 2010-03-19 11:08:55: shuttle vacuum sense fail
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Mar 19 14:55:56 PDT 2010
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Problem lampoly SNF 2010-03-19 11:08:55: shuttle vacuum sense fail
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Problem lampoly SNF 2010-03-26 14:45:31: piece dropped inside the chamber
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Cleaned the shuttle arm. Cycled 4 wafers.
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Problem lampoly SNF 2010-03-19 11:08:55: shuttle vacuum sense fail
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Problem lampoly SNF 2010-03-26 14:45:31: piece dropped inside the chamber
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