Shutdown lampoly SNF 2010-03-26 16:26:44: Dropped piece and electrode temp

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Mar 26 16:26:45 PDT 2010


The dropped piece could potentially interfere with wafer clamping so the chamber needs to be purged and opened to remove it.  The low electrode temperature will lead to poor etching.  If the recipe and standby temperatures are at 60, then it is likely a heat exchanger problem.  In any case, the system should not be used until these two issues are addressed because the etch quality will be badly affected.




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