Shutdown lampoly SNF 2010-03-26 16:26:44: Dropped piece and electrode temp

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Mar 26 16:36:26 PDT 2010

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Vented chamber and removed piece of broken wafer chip.

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Next message: Problem lampoly SNF 2010-03-29 20:18:01: Alarm 58: Load Lock arm failed initialize
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