Problem lampoly SNF 2010-03-29 20:18:01: Alarm 58: Load Lock arm failed initialize

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Mar 31 09:53:27 PDT 2010

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Initialized load lock arm and cycled 3 wafers.

Previous message: Problem lampoly SNF 2010-03-29 20:18:01: Alarm 58: Load Lock arm failed initialize
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