Shutdown lampoly SNF 2010-05-01 16:10:07: Arm failure

rparsa at snf.stanford.edu rparsa at snf.stanford.edu
Sat May 1 16:10:07 PDT 2010


Stock on the first dummy wafer with the following message: "22 Exit arm failued". It couldn't take the wafer out from the process chamber. My real wafer is sitting on the aligment arm.




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