Shutdown lampoly SNF 2010-05-01 16:10:07: Arm failure
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Sun May 2 06:52:11 PDT 2010
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Shutdown lampoly SNF 2010-05-01 16:10:07: Arm failure
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Problem lampoly SNF 2010-05-10 12:55:03: drop quartz slide
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Intialized exit load arm and unload wafers.
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Shutdown lampoly SNF 2010-05-01 16:10:07: Arm failure
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Problem lampoly SNF 2010-05-10 12:55:03: drop quartz slide
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