Problem lampoly SNF 2010-05-10 12:55:03: drop quartz slide

chongxie at snf.stanford.edu chongxie at snf.stanford.edu
Mon May 10 12:55:04 PDT 2010

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dropped a quartz slide off the carrier wafer into the main chamber

Previous message: Shutdown lampoly SNF 2010-05-01 16:10:07: Arm failure
Next message: Problem lampoly SNF 2010-05-10 12:55:03: drop quartz slide
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